Sputtering Targets

Deposit ultra-pure SiC thin films with Hexoloy® SG silicon carbide sputtering targets from Saint-Gobain.

Hexoloy® SG electrically conductive silicon carbide can be used for DC magnetron SiC sputtering targets. 

Silicon carbide thin film coatings are optically transparent, abrasion and corrosion resistant, temperature stable, and have excellent adhesion on a variety of substrates. Applications include optical data and magnetic hard disks, hard protective coatings on flat glass, and conductive or vapor barrier coatings.

Excellent thermal conductivity, corrosion resistance and hardness properties promote superior performance and stability in high temperature environments.