Compared to alumina oxide, silicon carbide is a lighter material, has lower thermal expansion, higher thermal conductivity and higher specific stiffness.

Structural components, such as Z-axis, bridge and support columns are more lightweight when made with silicon carbide, allowing faster travel and increased capacity to accommodate temperature changes.

Silicon carbide plates are an excellent choice for the air-bearing stage used in positioning equipment, particularly for semiconductor wafer inspection where it is advisable to ensure a close match between thermal expansion of the silicon wafer and silicon carbide stage.